Nrog rau kev nce ntawm kev lag luam xav tau, ntau thiab ntau hom sputtering lub hom phiaj tau hloov kho tas li.Qee tus paub thiab qee qhov tsis paub rau cov neeg siv khoom.Tam sim no, peb xav qhia rau koj txog dab tsi yog hom magnetron sputtering lub hom phiaj.
Sputtering lub hom phiaj muaj cov nram qab no: hlau sputtering txheej phiaj, alloy sputtering txheej phiaj, ceramic sputtering txheej phiaj, boride ceramic sputtering phiaj, carbide ceramic sputtering phiaj, fluoride ceramic sputtering phiaj, nitride ceramic sputtering phiaj, oxide ceramic phiaj, selenide ceramic sputtering phiaj , silicide ceramic sputtering phiaj, sulfide ceramic sputtering phiaj, telluride ceramic sputtering phiaj, lwm yam ceramic lub hom phiaj, Chromium doped silicon oxide ceramic phiaj (CR SiO), indium phosphide phiaj (INP), lead arsenide phiaj (pbas), indium arsenide phiaj (InAs ).
Magnetron sputtering feem ntau muab faib ua ob hom: DC sputtering thiab RF sputtering.Lub hauv paus ntsiab lus ntawm DC sputtering cov cuab yeej yog yooj yim, thiab nws tus nqi kuj yog ceev thaum sputtering hlau.RF sputtering yog dav siv.Ntxiv nrog rau sputtering conductive cov ntaub ntawv, nws tseem tuaj yeem sputter cov ntaub ntawv uas tsis yog conductive.Nyob rau tib lub sijhawm, lub hom phiaj sputtering kuj tseem ua kom rov ua dua sputtering los npaj cov ntaub ntawv sib xyaw xws li oxides, nitrides thiab carbides.Yog tias RF zaus nce, nws yuav dhau los ua microwave plasma sputtering.Tam sim no, electron cyclotron resonance (ECR) microwave plasma sputtering feem ntau yog siv.
Post lub sij hawm: May-18-2022