Rich Special Materials Co., LTD los qhia Dab tsi yog qhov kev ua tau zoo ntawm cov khoom siv

Kev siv dav ntawm cov khoom siv hauv ntau txoj haujlwm ua rau qhov kev thov rau cov khoom siv lub hom phiaj siab dua thiab siab dua.Hauv qab no Peb yuav qhia luv luv koj dab tsi yog lub luag haujlwm tseem ceeb ntawm lub hom phiaj, hophauv pab koj.

Purity: Purity yog ib qho tseem ceeb ntawm kev ua haujlwm ntawm lub hom phiaj, vim tias qhov purity ntawm lub hom phiaj muaj kev cuam tshuam zoo rau kev ua haujlwm ntawm cov yeeb yaj kiab.Tab sis nyob rau hauv kev xyaum, lub purity ntawm lub hom phiaj cov ntaub ntawv tsis yog tib yam.Piv txwv li, nrog kev loj hlob sai ntawm microelectronics txoj hauj lwm, qhov luaj li cas ntawm silicon wafer tau tsim los ntawm 6 ", 8 "mus rau 12", thiab txoj kab dav dav tau txo qis los ntawm 0.5um mus rau 0.25um, 0.18um thiab txawm tias 0.13um.Ib zaug 99.995% ntawm lub hom phiaj purity tuaj yeem ua tau raws li cov txheej txheem thev naus laus zis ntawm 0.35UMIC.Kev npaj ntawm 0.18um kab yuav tsum 99.999% lossis txawm tias 99.9999% purity ntawm cov khoom siv.

Ceev: Yuav kom txo tau cov porosity nyob rau hauv lub hom phiaj khoom thiab txhim kho kev ua hauj lwm ntawm sputtering zaj duab xis, lub hom phiaj yog feem ntau yuav tsum muaj ib tug siab ceev.Lub hom phiaj ceev tsis yog tsuas yog tus nqi sputtering xwb tab sis kuj muaj hluav taws xob thiab kho qhov muag ntawm cov yeeb yaj kiab.Qhov siab dua ntawm lub hom phiaj ceev, qhov ua haujlwm ntawm cov yeeb yaj kiab zoo dua.Ntxiv rau qhov ntom thiab lub zog ntawm cov khoom siv lub hom phiaj tau nce ntxiv kom nws muaj peev xwm tiv taus cov thermal stress thaum lub sij hawm sputtering.Qhov ntom kuj yog ib qho tseem ceeb ntawm kev ua haujlwm tseem ceeb ntawm cov hom phiaj tshuaj.

　　Cov ntsiab lus impurity: impurities nyob rau hauv lub hom phiaj khoom thiab oxygen thiab dej vapor nyob rau hauv lub qhov hws yog cov thawj cov pa phem qhov chaw ntawm cov films accumulated.Different cov ntaub ntawv rau lub hom phiaj sib txawv muaj cov kev cai sib txawv rau txawv impurity ntsiab lus.Piv txwv li, ntshiab aluminium thiab aluminium alloy lub hom phiaj siv nyob rau hauv semiconductor kev lag luam muaj tshwj xeeb yuav tsum tau rau cov ntsiab lus ntawm alkali hlau thiab cov ntsiab lus ntawm cov khoom siv hluav taws xob.