Lub tshuab nqus tsev yog hais txog cua sov thiab evaporating qhov chaw evaporation hauv lub tshuab nqus tsev lossis sputtering nrog nrawm ion foob pob, thiab tso rau ntawm qhov chaw ntawm lub substrate los ua ib txheej ib txheej lossis ntau txheej zaj duab xis.Lub hauv paus ntsiab lus ntawm lub tshuab nqus tsev yog dab tsi?Tom ntej no, tus editor ntawm RSM yuav qhia nws rau peb.
1. Nqus evaporation txheej
evaporation txheej yuav tsum tau hais tias qhov kev ncua deb ntawm cov vapor molecules los yog atoms los ntawm lub evaporation qhov chaw thiab lub substrate yuav tsum tau coated yuav tsum tsawg tshaj li qhov nruab nrab ntawm cov dawb txoj kev ntawm cov seem roj molecules nyob rau hauv lub txheej txheej, thiaj li yuav xyuas kom meej tias lub vapor molecules ntawm lub evaporation tuaj yeem ncav cuag qhov chaw ntawm lub substrate yam tsis muaj kev sib tsoo.Xyuas kom meej tias zaj duab xis yog ntshiab thiab ruaj, thiab evaporation yuav tsis oxidize.
2. Nqus sputtering txheej
Hauv lub tshuab nqus tsev, thaum cov ions nrawm nrawm sib tsoo nrog cov khoom, ntawm ib sab, cov siv lead ua puas lawm, ntawm qhov tod tes, lawv sib tsoo nrog cov atoms uas ua rau cov siv lead ua, thiab thaum kawg cov atoms lossis molecules ntawm cov khoom. sputter sab nraud.Cov khoom siv sputtered yog plated rau ntawm substrate los ua ib zaj duab xis nyias, uas yog hu ua lub tshuab nqus tsev sputter plating.Muaj ntau txoj hauv kev sputtering, ntawm cov diode sputtering yog qhov ntxov tshaj plaws.Raws li cov hom phiaj cathode sib txawv, nws tuaj yeem muab faib ua tam sim no ncaj qha (DC) thiab siab zaus (RF).Tus naj npawb ntawm atoms sputtered los ntawm kev cuam tshuam lub hom phiaj nto nrog ib qho ion yog hu ua sputtering rate.Nrog siab sputtering tus nqi, zaj duab xis tsim ceev yog ceev.Tus nqi sputtering muaj feem xyuam rau lub zog thiab hom ions thiab hom phiaj khoom siv.Feem ntau hais lus, tus nqi sputtering nce nrog kev nce ntawm tib neeg ion zog, thiab tus nqi sputtering ntawm cov hlau muaj txiaj ntsig yog siab dua.
Post lub sij hawm: Lub Xya hli ntuj-14-2022