Lub hom phiaj cov khoom siv hauv kev lag luam cia cov ntaub ntawv yuav tsum muaj siab purity, thiab impurities thiab pores yuav tsum tau txo kom tsis txhob muaj impurity hais thaum lub sij hawm sputtering.Lub hom phiaj cov khoom siv rau cov khoom zoo yuav tsum tau hais tias nws cov khoom siv lead ua me me yuav tsum yog me me thiab zoo ib yam, thiab tsis muaj kev qhia siv lead ua.Hauv qab no, cia peb saib cov kev xav tau ntawm kev lag luam kho qhov muag rau cov khoom siv?
1. Kev ntshiab
Hauv kev siv tswv yim, purity ntawm cov khoom siv sib txawv raws li kev lag luam sib txawv thiab cov kev xav tau.Txawm li cas los xij, tag nrho, qhov siab dua qhov purity ntawm cov khoom siv lub hom phiaj, qhov ua tau zoo ntawm cov zaj duab xis sputtered.Piv txwv li, hauv kev lag luam kho qhov muag, qhov purity ntawm cov khoom siv yuav tsum muaj ntau dua 3N5 lossis 4N.
2. Cov ntsiab lus impurity
Cov khoom siv lub hom phiaj yog lub hauv paus cathode hauv sputtering, thiab impurities nyob rau hauv cov khoom thiab oxygen thiab dej vapor nyob rau hauv lub qhov hws yog lub ntsiab pa phem qhov chaw rau depositing nyias films.Tsis tas li ntawd, muaj cov kev cai tshwj xeeb rau cov hom phiaj ntawm kev siv sib txawv.Ua qhov kev lag luam kho qhov muag ua piv txwv, cov ntsiab lus impurity nyob rau hauv sputtering lub hom phiaj yuav tsum tau tswj tsawg heev los xyuas kom meej qhov zoo ntawm txheej.
3. Cov qoob loo loj thiab loj faib
Feem ntau, cov khoom siv lub hom phiaj muaj cov qauv polycrystalline, nrog rau qhov ntau thiab tsawg los ntawm micrometers mus rau millimeters.Rau cov hom phiaj nrog tib lub ntsiab lus, qhov sputtering tus nqi ntawm cov hmoov nplej zoo yog sai dua li cov hom phiaj ntawm cov pob zeb ntxhib.Rau cov hom phiaj nrog cov nplej me me sib txawv, cov yeeb yaj kiab tso tawm yuav zoo li qub.
4. Compactness
Txhawm rau txo qhov porosity hauv cov khoom siv lub hom phiaj thiab txhim kho kev ua yeeb yaj kiab, nws feem ntau yuav tsum tau hais tias cov khoom siv sputtering lub hom phiaj muaj qhov ntom ntom.Qhov ntom ntawm cov khoom siv lub hom phiaj feem ntau yog nyob ntawm cov txheej txheem kev npaj.Lub hom phiaj cov khoom tsim los ntawm melting thiab casting txoj kev tuaj yeem ua kom ntseeg tau tias tsis muaj qhov pores hauv cov khoom siv lub hom phiaj thiab qhov ceev yog siab heev.
Post lub sij hawm: Lub Xya hli ntuj-18-2023