Lub hom phiaj sputtering yog cov khoom siv hluav taws xob uas tsim cov yeeb yaj kiab nyias los ntawm kev txuas cov khoom xws li hlau lossis hlau oxide rau hauv hluav taws xob substrate ntawm qib atomic.Ntawm lawv, lub hom phiaj sputtering rau blackening zaj duab xis yog siv los tsim ib zaj duab xis ntawm cov organic EL los yog kua siv lead ua vaj huam sib luag kom blacken cov xov hlau thiab txo cov teeb pom kev zoo (tsawg reflectance) ntawm TFT thaiv.Lub hom phiaj sputter muaj qhov zoo thiab cov teebmeem hauv qab no.Piv nrog rau cov khoom yav dhau los, nws pab txhim kho cov qib siab ntawm fineness thiab tsim kev ywj pheej ntawm ntau yam kev qhia, thiab txo cov suab nrov los ntawm kev xaim cuam tshuam lub teeb ntawm cov khoom siv semiconductor.
Qhov zoo thiab qhov cuam tshuam ntawm lub hom phiaj aluminium:
(1) Tom qab lub hom phiaj aluminium yog tsim rau ntawm cov xaim, lub teeb pom kev tuaj yeem raug txo
piv nrog cov khoom dhau los, nws tuaj yeem ua tiav qhov kev xav tau qis.
(2) DC sputtering tuaj yeem ua tau yam tsis muaj roj reactive
piv nrog rau yav dhau los cov khoom, nws yuav pab tau kom paub cov zaj duab xis homogeneity ntawm loj substrates.
(3) Tom qab cov yeeb yaj kiab tau tsim, cov txheej txheem etching tuaj yeem ua ke nrog cov xaim
kho cov khoom raws li cov txheej txheem etching uas twb muaj lawm ntawm tus neeg siv khoom, thiab tuaj yeem etch ua ke nrog cov xov hlau tsis hloov cov txheej txheem uas twb muaj lawm.Tsis tas li ntawd, lub tuam txhab tseem yuav muab kev txhawb nqa raws li cov kev cai sputtering ntawm cov neeg siv khoom.
(4) Ua haujlwm kub zoo, dej thiab alkali tsis kam
Ntxiv nrog rau cov dej tsis kam thiab alkali tsis kam, nws kuj muaj cov cua sov ua haujlwm siab, yog li cov yam ntxwv ntawm cov yeeb yaj kiab yuav tsis hloov pauv hauv TFT thaiv txheej txheem.
Post lub sij hawm: Aug-10-2022