Raws li peb txhua tus paub, lub tshuab nqus tsev vacuum thiab ion sputtering feem ntau yog siv rau hauv lub tshuab nqus tsev.Dab tsi yog qhov txawv ntawm evaporation txheej thiab sputtering txheej?Tom ntej no, cov kws tshaj lij ntawm RSM yuav qhia rau peb.
Nqus evaporation txheej yog kom sov cov khoom kom evaporated mus rau ib tug tej yam kub los ntawm kev tiv thaiv cua sov los yog electron beam thiab laser bombardment nyob rau hauv ib puag ncig nrog ib tug nqus degree ntawm tsis tsawg tshaj li 10-2Pa, kom lub thermal vibration zog ntawm molecules los yog atoms nyob rau hauv cov ntaub ntawv ntau tshaj lub binding zog ntawm lub nto, thiaj li hais tias ib tug loj tus naj npawb ntawm molecules los yog atoms evaporate los yog sublimate, thiab ncaj qha precipitate rau lub substrate los tsim ib zaj duab xis.Ion sputtering txheej siv lub zog ceev ceev ntawm cov ions zoo tsim los ntawm cov pa tawm hauv qab qhov kev ua ntawm hluav taws xob los foob lub hom phiaj raws li cathode, kom cov atoms lossis molecules nyob rau hauv lub hom phiaj khiav tawm thiab precipitate rau saum npoo ntawm plated workpiece tsim. xav tau zaj duab xis.
Txoj kev siv ntau tshaj plaws ntawm lub tshuab nqus tsev evaporation txheej yog cov cua sov ua haujlwm, uas muaj qhov zoo ntawm cov qauv yooj yim, tus nqi qis thiab kev ua haujlwm yooj yim;Qhov tsis zoo yog tias nws tsis haum rau cov hlau refractory thiab kub resistant dielectric cov ntaub ntawv.Electron beam cua sov thiab laser cua sov tuaj yeem kov yeej qhov tsis zoo ntawm cov cua sov ua haujlwm.Hauv hluav taws xob hluav taws xob hluav taws xob, lub teeb tsom hluav taws xob siv hluav taws xob ncaj qha rau cov khoom siv hluav taws xob, thiab lub zog hluav taws xob ntawm cov hluav taws xob hluav taws xob ua hluav taws xob, uas ua rau cov khoom evaporate.Laser cua sov siv high-power laser raws li cov cua kub qhov chaw, tab sis vim hais tias ntawm high-power lasers, nws tsuas yog siv nyob rau hauv ob peb lub chaw soj nstuam tam sim no.
Sputtering tshuab yog txawv ntawm lub tshuab nqus tsev evaporation technology."Sputtering" yog hais txog qhov tshwm sim uas cov khoom siv foob pob tawg rau saum npoo (lub hom phiaj) thiab ua rau cov khoom atoms lossis cov molecules tua tawm ntawm qhov chaw.Feem ntau ntawm cov emissions yog nyob rau hauv atomic lub xeev, uas yog feem ntau hu ua sputtered atoms.Cov khoom siv hluav taws xob uas siv los tua lub hom phiaj tuaj yeem yog cov khoom siv hluav taws xob, ions lossis cov khoom nruab nrab.Vim tias ions yooj yim rau kev nrawm hauv qab hluav taws xob kom tau txais lub zog kinetic xav tau, lawv feem ntau siv ions ua cov khoom tawg.Sputtering txheej txheem yog raws li lub teeb tawm, uas yog, sputtering ions los ntawm cov pa tawm.Txawv sputtering technologies txais txawv glow paug hom.DC diode sputtering siv DC glow tawm;Triode sputtering yog lub teeb ci ntsa iab txhawb los ntawm kub cathode;RF sputtering siv RF glow paug;Magnetron sputtering yog ib qho hluav taws xob tso tawm los ntawm ib qho chaw sib nqus sib nqus.
Piv nrog lub tshuab nqus tsev evaporation txheej, sputtering txheej muaj ntau yam zoo.Piv txwv li, txhua yam khoom tuaj yeem raug sputtered, tshwj xeeb tshaj yog cov ntsiab lus thiab cov tebchaw uas muaj cov ntsiab lus melting siab thiab qis vapor siab;Lub adhesion ntawm sputtered zaj duab xis thiab substrate yog zoo;High zaj duab xis ceev;Cov yeeb yaj kiab tuab tuaj yeem tswj tau thiab rov ua dua tau zoo.Qhov tsis zoo yog tias cov cuab yeej siv tau yooj yim thiab xav tau cov khoom siv hluav taws xob siab.
Tsis tas li ntawd, kev sib xyaw ua ke ntawm txoj kev evaporation thiab sputtering txoj kev yog ion plating.Qhov zoo ntawm txoj kev no yog tias cov zaj duab xis tau txais muaj zog adhesion nrog lub substrate, siab deposition npaum li cas thiab siab film ceev.
Post lub sij hawm: Lub Xya hli ntuj-20-2022