Ib txoj kev tshawb fawb tshiab hauv phau ntawv xov xwm Pob Zeb Diamond thiab Cov Khoom Siv Muaj feem xyuam tsom rau kev etching ntawm polycrystalline pob zeb diamond nrog FeCoB etchant los tsim cov qauv.Raws li cov txiaj ntsig ntawm kev txhim kho thev naus laus zis no, pob zeb diamond nto tuaj yeem tau txais yam tsis muaj kev puas tsuaj thiab muaj qhov tsis xws luag.
Kev tshawb fawb: Spatial xaiv etching ntawm pob zeb diamond hauv cov khoom siv FeCoB nrog cov qauv photolithographic.Duab credit: Bjorn Wilezic/Shutterstock.com
Los ntawm cov txheej txheem ntawm lub xeev diffusion, FeCoB nanocrystalline films (Fe: Co: B = 60: 20: 20, atomic ratio) tuaj yeem ua tiav cov phiaj xwm lattice thiab tshem tawm cov pob zeb diamond hauv microstructure.
Pob zeb diamond muaj qhov tshwj xeeb biochemical thiab pom kev zoo, nrog rau siab elasticity thiab lub zog.Nws qhov ua tau zoo kawg nkaus yog qhov tseem ceeb ntawm kev nce qib hauv ultra precision machining (pob zeb diamond tig thev naus laus zis) thiab txoj hauv kev mus rau qhov siab tshaj plaws ntawm ntau pua GPa.
Chemical impermeability, qhov pom kev ua haujlwm ntev thiab kev ua haujlwm lom neeg ua rau muaj peev xwm tsim cov tshuab uas siv cov kev ua haujlwm zoo.Pob zeb diamond tau ua lub npe rau nws tus kheej hauv kev lag luam mechatronics, optics, sensors thiab kev tswj cov ntaub ntawv.
Txhawm rau pab kom lawv daim ntawv thov, kev sib txuas ntawm cov pob zeb diamond thiab lawv cov qauv tsim teeb meem pom tseeb.Reactive ion etching (RIE), inductively coupled plasma (ICP), thiab electron beam induced etching yog cov piv txwv ntawm cov txheej txheem uas twb muaj lawm uas siv cov txheej txheem etching (EBIE).
Pob zeb diamond qauv kuj tsim siv laser thiab tsom ion beam (FIB) ua cov txheej txheem.Lub hom phiaj ntawm cov txheej txheem fabrication no yog kom ceev delamination nrog rau kev tso cai scaling hla thaj chaw loj hauv kev tsim khoom ua tiav.Cov txheej txheem no siv cov kua etchants (plasma, gases, thiab kua daws), uas txwv cov geometric complexity ua tiav.
Qhov kev tshawb fawb txog kev ua haujlwm ntawm cov khoom siv ablation los ntawm cov tshuaj vapor tiam thiab tsim cov pob zeb diamond polycrystalline nrog FeCoB (Fe: Co: B, 60: 20: 20 atomic feem pua) ntawm qhov chaw.Lub ntsiab xim yog them rau kev tsim ntawm TM qauv rau kev etching ntawm meter-scale qauv hauv pob zeb diamond.Lub pob zeb diamond hauv qab yog sib txuas rau nanocrystalline FeCoB los ntawm kev kho cua sov ntawm 700 txog 900 ° C rau 30 txog 90 feeb.
Ib txheej tsis zoo ntawm cov qauv pob zeb diamond qhia tau hais tias ib qho hauv qab polycrystalline microstructure.Qhov roughness (Ra) nyob rau hauv txhua qhov tshwj xeeb yog 3.84 ± 0.47 nm, thiab tag nrho qhov roughness yog 9.6 ± 1.2 nm.Lub roughness (hauv ib pob zeb diamond grain) ntawm implanted FeCoB hlau txheej yog 3.39 ± 0.26 nm, thiab txheej qhov siab yog 100 ± 10 nm.
Tom qab annealing ntawm 800 ° C rau 30 min, hlau nto thickness tau nce mus rau 600 ± 100 nm, thiab nto roughness (Ra) nce mus rau 224 ± 22 nm.Thaum lub sij hawm annealing, carbon atoms diffuse mus rau hauv FeCoB txheej, uas ua rau ib tug loj loj.
Peb cov qauv nrog FeCoB txheej 100 nm tuab tau ua kom sov ntawm qhov kub ntawm 700, 800, thiab 900 ° C, feem.Thaum qhov kub thiab txias qis dua 700 ° C, tsis muaj kev sib txuas tseem ceeb ntawm pob zeb diamond thiab FeCoB, thiab cov khoom siv tsawg heev raug tshem tawm tom qab kev kho hydrothermal.Kev tshem tawm cov khoom yog kho kom zoo rau qhov kub siab tshaj 800 ° C.
Thaum qhov kub txog 900 ° C, qhov etching tus nqi nce ob zaug piv rau qhov kub ntawm 800 ° C.Txawm li cas los xij, qhov profile ntawm thaj tsam etched yog qhov sib txawv ntawm qhov kev cog lus etched sequences (FeCoB).
Schematic qhia pom kev pom ntawm lub xeev etchant los tsim cov qauv: Spatially xaiv cov khoom hauv lub xeev etching ntawm pob zeb diamond siv photolithographically patterned FeCoB.Duab credit: Van Z. thiab Shankar MR et al., Pob zeb diamond thiab lwm yam ntaub ntawv.
FeCoB cov qauv 100 nm tuab ntawm cov pob zeb diamond tau ua tiav ntawm 800 ° C rau 30, 60, thiab 90 feeb, feem.
Qhov roughness (Ra) ntawm thaj chaw engraved tau txiav txim siab ua haujlwm ntawm lub sijhawm teb ntawm 800 ° C.Lub hardness ntawm cov qauv tom qab annealing rau 30, 60 thiab 90 feeb yog 186 ± 28 nm, 203 ± 26 nm thiab 212 ± 30 nm, feem.Nrog rau qhov etch qhov tob ntawm 500, 800, lossis 100 nm, qhov piv (RD) ntawm qhov roughness ntawm thaj chaw engraved rau qhov etch qhov tob yog 0.372, 0.254, thiab 0.212, feem.
Qhov roughness ntawm thaj tsam etched tsis nce ntau nrog nce etching qhov tob.Nws tau pom tias qhov ntsuas kub xav tau rau cov tshuaj tiv thaiv ntawm pob zeb diamond thiab HM etchant yog tshaj 700 ° C.
Cov txiaj ntsig ntawm txoj kev tshawb fawb qhia tias FeCoB tuaj yeem tshem tawm pob zeb diamond zoo ntawm tus nqi nrawm dua li Fe lossis Co ib leeg.
Post lub sij hawm: Aug-31-2023