Nyob rau hauv xyoo tas los no, nrog kev nce qib ntawm kev sib koom ua ke (IC) thev naus laus zis, cov kev siv cuam tshuam ntawm kev sib koom ua ke tau tsim sai heev.Ultra siab purity aluminium alloy sputtering lub hom phiaj, raws li cov khoom txhawb nqa hauv kev tsim cov khoom siv hluav taws xob sib txuas, tau dhau los ua cov ntsiab lus kub hauv kev tshawb fawb hauv tsev tsis ntev los no.tus editor ntawm RSM yuav qhia peb cov yam ntxwv ntawm siab purity aluminium alloy sputtering lub hom phiaj.
Txhawm rau txhawm rau txhim kho qhov ua tau zoo ntawm sputtering ntawm magnetron sputtering lub hom phiaj thiab xyuas kom zoo ntawm cov yeeb yaj kiab tso tawm, ntau qhov kev sim qhia tau hais tias muaj qee yam yuav tsum tau ua rau muaj pes tsawg leeg, microstructure thiab grain orientation ntawm ultra-siab purity aluminium alloy sputtering lub hom phiaj.
Cov qoob loo loj thiab kev taw qhia ntawm lub hom phiaj muaj kev cuam tshuam zoo rau kev npaj thiab cov khoom ntawm IC films.Cov txiaj ntsig tau pom tias qhov tso nyiaj txo qis nrog qhov nce ntawm cov nplej loj;Rau lub hom phiaj sputtering nrog tib qhov muaj pes tsawg leeg, tus nqi sputtering ntawm lub hom phiaj nrog cov nplej me me yog nrawm dua li ntawm lub hom phiaj nrog cov nplej loj;Qhov ntau uniform lub grain loj ntawm lub hom phiaj, ntau uniform thickness faib ntawm cov deposited films.
Nyob rau hauv tib lub cuab yeej sputtering thiab cov txheej txheem tsis, qhov sputtering tus nqi ntawm Al Cu alloy lub hom phiaj nce nrog qhov nce ntawm atomic ntom, tab sis nws yog feem ntau ruaj khov nyob rau hauv ntau yam.Cov nyhuv ntawm grain loj ntawm sputtering tus nqi yog vim qhov kev hloov ntawm atomic ntom nrog kev hloov ntawm grain loj;Tus nqi deposition feem ntau cuam tshuam los ntawm cov nplej orientation ntawm Al Cu alloy phiaj.Raws li kev ua kom ntseeg tau qhov kev faib ua feem ntawm (200) cov dav hlau siv lead ua, qhov nce ntawm qhov feem pua ntawm (111), (220) thiab (311) siv lead ua dav hlau yuav nce tus nqi deposition.
Cov qoob loo loj thiab cov kab lis kev cai ntawm ultra-siab purity aluminium alloy lub hom phiaj yog hloov kho thiab tswj los ntawm ingot homogenization, kub ua hauj lwm thiab recrystallization annealing.Nrog rau txoj kev loj hlob ntawm wafer loj mus rau 20.32cm (8in) thiab 30.48cm (12in), lub hom phiaj loj kuj nce, uas tso rau pem hauv ntej cov kev xav tau ntau dua rau ultra-siab purity aluminium alloy sputtering lub hom phiaj.Txhawm rau kom ntseeg tau tias cov yeeb yaj kiab zoo thiab cov txiaj ntsig, cov phiaj xwm kev ua haujlwm yuav tsum tau tswj nruj kom ua kom lub hom phiaj microstructure zoo ib yam thiab cov lis kev taw qhia yuav tsum muaj zog (200) thiab (220) dav hlau textures.
Post lub sij hawm: Jun-30-2022