Tsis ntev los no, ntau tus phooj ywg nug txog cov yam ntxwv ntawm molybdenum sputtering lub hom phiaj.Hauv kev lag luam hluav taws xob, txhawm rau txhawm rau txhim kho kev ua haujlwm ntawm sputtering thiab xyuas kom zoo ntawm cov yeeb yaj kiab tso tawm, dab tsi yog qhov yuav tsum muaj rau cov yam ntxwv ntawm molybdenum sputtering lub hom phiaj?Tam sim no cov kws tshaj lij ntawm RSM yuav piav qhia rau peb.
1. Kev ntshiab
High purity yog ib qho tseem ceeb yam ntxwv yuav tsum tau ntawm molybdenum sputtering lub hom phiaj.Qhov siab dua qhov purity ntawm molybdenum lub hom phiaj, qhov kev ua tau zoo ntawm sputtered zaj duab xis.Feem ntau, qhov purity ntawm molybdenum sputtering lub hom phiaj yuav tsum yog tsawg kawg yog 99.95% (qhov loj feem, tib yam hauv qab no).Txawm li cas los xij, nrog kev txhim kho tas mus li ntawm qhov loj ntawm cov iav substrate hauv LCD kev lag luam, qhov ntev ntawm cov xaim yuav tsum tau txuas ntxiv thiab cov kab dav dav yuav tsum yog nyias.Txhawm rau kom ntseeg tau qhov sib xws ntawm zaj duab xis thiab qhov zoo ntawm cov xaim, qhov purity ntawm molybdenum sputtering lub hom phiaj tseem yuav tsum tau nce ntxiv raws li.Yog li ntawd, raws li qhov luaj li cas ntawm sputtered iav substrate thiab siv ib puag ncig, purity ntawm molybdenum sputtering lub hom phiaj yuav tsum yog 99.99% - 99.999% los yog ntau dua.
Molybdenum sputtering lub hom phiaj yog siv los ua cathode qhov chaw hauv sputtering.Cov impurities nyob rau hauv cov khoom thiab oxygen thiab dej vapor nyob rau hauv pores yog lub ntsiab pa phem qhov chaw ntawm deposited films.Tsis tas li ntawd, nyob rau hauv kev lag luam hluav taws xob, vim hais tias alkali hlau ions (Na, K) yog ib qho yooj yim los ua mobile ions nyob rau hauv lub rwb thaiv tsev txheej, kev ua tau zoo ntawm cov khoom qub yog txo;Cov ntsiab lus xws li uranium (U) thiab titanium (TI) yuav raug tso tawm α X-ray, uas ua rau cov khoom tawg yooj yim;Hlau thiab npib tsib xee ions yuav ua rau muaj kev cuam tshuam thiab ua kom cov pa oxygen ntxiv.Yog li ntawd, nyob rau hauv cov txheej txheem ntawm molybdenum sputtering lub hom phiaj, cov impurity ntsiab yuav tsum tau nruj me ntsis tswj kom txo tau lawv cov ntsiab lus nyob rau hauv lub hom phiaj.
2. Cov qoob loo loj thiab qhov loj me faib
Feem ntau, lub hom phiaj molybdenum sputtering yog polycrystalline qauv, thiab cov nplej loj tuaj yeem nyob ntawm micron mus txog millimeter.Cov txiaj ntsig kev sim qhia tau hais tias qhov sputtering tus nqi ntawm lub hom phiaj zoo yog sai dua li ntawm cov hom phiaj ntxhib;Rau lub hom phiaj nrog cov nplej me me sib txawv, cov thickness faib ntawm cov zaj duab xis deposited kuj zoo ib yam.
3. Crystal orientation
Vim hais tias lub hom phiaj atoms yog ib qho yooj yim uas yuav nyiam sputtered raws li cov kev taw qhia ntawm qhov ze tshaj plaws ntawm cov atoms nyob rau hauv lub hexagonal kev taw qhia thaum lub sij hawm sputtering, thiaj li yuav ua tau lub siab tshaj plaws sputtering tus nqi, lub sputtering tus nqi yog feem ntau nce los ntawm kev hloov cov siv lead ua qauv ntawm lub hom phiaj.Crystal kev taw qhia ntawm lub hom phiaj kuj muaj kev cuam tshuam zoo rau lub thickness uniformity ntawm sputtered zaj duab xis.Yog li ntawd, nws yog ib qho tseem ceeb heev kom tau txais ib qho qauv siv lead ua taw qhia rau cov txheej txheem sputtering ntawm zaj duab xis.
4. Ceev ceev
Nyob rau hauv tus txheej txheem ntawm sputtering txheej, thaum lub sputtering lub hom phiaj nrog tsawg ntom yog bombarded, cov roj uas twb muaj lawm nyob rau hauv lub internal pores ntawm lub hom phiaj yog dheev tso tawm, ua rau lub splashing ntawm loj-loj lub hom phiaj hais los yog hais, los yog cov ntaub ntawv zaj duab xis yog bombarded. los ntawm theem nrab electrons tom qab tsim zaj duab xis, uas ua rau particle splashing.Cov tsos ntawm cov khoom no yuav txo qhov zoo ntawm zaj duab xis.Txhawm rau txo cov pores hauv lub hom phiaj khoom thiab txhim kho cov yeeb yaj kiab ua tau zoo, lub hom phiaj sputtering feem ntau yuav tsum muaj qhov ntom ntom.Rau lub hom phiaj molybdenum sputtering, nws cov txheeb ze ntom ntom yuav tsum ntau dua 98%.
5. Kev khi ntawm lub hom phiaj thiab chassis
Feem ntau, molybdenum sputtering lub hom phiaj yuav tsum tau txuas nrog cov pa oxygen dawb tooj liab (lossis txhuas thiab lwm yam ntaub ntawv) chassis ua ntej sputtering, kom cov thermal conductivity ntawm lub hom phiaj thiab chassis yog zoo thaum lub sij hawm sputtering.Tom qab kev khi, kev tshuaj xyuas ultrasonic yuav tsum tau ua kom ntseeg tau tias qhov chaw tsis sib txuas ntawm ob yog tsawg dua 2%, thiaj li ua tau raws li qhov yuav tsum tau muaj ntawm lub zog loj sputtering yam tsis poob tawm.
Post lub sij hawm: Lub Xya hli ntuj-19-2022